Magma Excalibur-Litho Fab Analysis Framework for Lithography

Magma Design Automation introduced Excalibur-Litho fab analysis framework for the development and monitoring of advanced lithography solutions. The tool collects and organizes design and real-time data from the semiconductor manufacturing floor (such as defectivity, metrology and tool history). Excalibur-Litho is built on an open-architecture database that enables safe and secured CAD access and easy fab integration.

Magma Design Automation Excalibur-Litho fab analysis framework for the development and monitoring of advanced lithography solutions

Magma Excalibur-Litho Features

  • First system to integrate design and real-time data from the semiconductor manufacturing floor
  • Optimizes yield ramps
  • Built-in solutions for litho qualification through the proprietary coupling of design-based binning, electrical cross mapping, and fab-wide data correlation
  • Based on a proven fab analysis framework
  • Enables comprehensive examination of inline lithography-based defects
  • Turns data into knowledge
  • Speeds lithography-based process improvement
  • Collects and organizes defectivity, metrology, electrical tools and manufacturing execution system (MES) data
  • Wafer information is stacked and cross-mapped to a layout, schematic or netlist design representation
  • Built on a open-architecture database developed by Magma
  • Provides safe and secured CAD access and easy fab integration
  • Open architecture enables interoperability with most inspection tools and yield analysis databases

More info: Magma Design Automation